Research topics - MEMS

Advanced Material Integration

• Dielectric transduction for MEMS (contact: B. Legrand)
• Piezoelectric transduction for MEMS (contact: L. Nicu/D. Saya)
• Spin-cross over materials for MEMS transduction (contact: L. Nicu/T. Leichle)
• Integration of hybrid nanostructures into MEMS (contact: C. Bergaud)
• Electroactive polymer-based actuators for artificial muscles and soft robotics (contact: C. Bergaud)
• Osmotic muscle: from an original active material to an innovative actuator for robotic (contact: V. Mansard)
• Portable magnetic devices (contact: T. Leichle)

Instrumentation/Mechanical Characterization

• MEMS-based high-speed AFM (contact: B. Legrand)
• Ultra-low-power logic gates based on contactless capacitive MEMS (contact: B. Legrand)

Biosensing

• Neural probe for brain recording and stimulation (contact: C. Bergaud)
• Resonating MEMS biosensors (contact: L. Nicu/T. Leichle)
• Biofunctionalization strategies (contact: L. Nicu/T. Leichle)
• Nanofluidic-based biosensors (contact: T. Leichle)
• Lateral porous silicon membranes for lab-on-a-chip (contact: T. Leichle)